Deposition of thin films of TiO2 from Langmuir–Blodgett film precursors

Excellent quality thin TiO2 films have been obtained by the thermal decomposition of n‐octadecyl amine‐titanyl oxalate complex multilayer Langmuir–Blodgett films. The films were characterized by x‐ray diffraction and x‐ray photoemission studies. X‐ray diffraction studies suggest a preferred orientation of the TiO2 films.

[1]  D. J. Johnson,et al.  Fabrication of ultrathin metal oxide films using Langmuir–Blodgett deposition , 1992 .

[2]  F. Gotor,et al.  Crystal structure of barium titanyl oxalate BaTiO(C2O4)2.4.5H2O , 1991 .

[3]  High-speed Ga/sub 0.47/In/sub 0.53/As MISIM photodetectors with dielectric-assisted Schottky barriers , 1989, IEEE Electron Device Letters.

[4]  W. K. Chan,et al.  InGaAs shallow junction fabrication using Langmuir–Blodgett film diffusion source , 1990 .

[5]  K. B. Blodgett Films Built by Depositing Successive Monomolecular Layers on a Solid Surface , 1935 .

[6]  N. Armstrong,et al.  X-ray photoelectron spectroscopy of TiO2 and other titanate electrodes and various standard Titanium oxide materials: Surface compositional changes of the TiO2 electrode during photoelectrolysis , 1978 .

[7]  M. Greenblatt,et al.  Lithium insertion into Li2Ti3O7 , 1985 .

[8]  S. Badrinarayanan,et al.  Attenuation length measurements in cadmium arachidate Langmuir-Blodgett films , 1991 .

[9]  M. Sastry,et al.  Studies on the deposition of titanyl oxalate ions using long-chain hydrocarbon amines , 1993 .

[10]  G. Roberts,et al.  Langmuir-Blodgett films , 1984 .

[11]  R. K. Quinn,et al.  Auger and X-ray photoelectron spectroscopic and electrochemical characterization of titanium thin film electrodes , 1977 .

[12]  M. Sastry,et al.  Novel structure of Langmuir-Blodgett films of chloroplatinic acid using n-octadecylamine: evidence for interdigitation of hydrocarbon chains , 1993 .

[13]  J. H. Scofield,et al.  Hartree-Slater subshell photoionization cross-sections at 1254 and 1487 eV , 1976 .