Phase correction for rapid en-face scanning with pulsed terahertz radiation

An enhanced measurement system for terahertz pulsed imaging is presented that is capable of effectively performing en-face and three-dimensional scans of planar and curved surfaces. The bending of the scanning surface in one direction is compensated by synchronously advancing the mechanical delay time with the deflection of a scanning mirror. The second scanning mirror for the fast scanning direction forms a telecentric system and does not exhibit phase distortion.

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