Scheduling decisions in the diffusion and cleaning area of a semiconductor manufacturing facility
have an important impact on the overall performance of a plant. Consequently, we want
to optimize those decisions while taking real-world constraints into account. An important
property of machines in this work area is their batching capability: They can perform multiple
operations at the same time. We want to take account of this in our algorithm.
We need to schedule a given set of jobs. For each of them, a fixed sequence of operations must
be performed. This sequence is called the route of the job. Operations can only be performed on
qualified machines and their processing durations depend on the selected machine. A capacity
limit constrains the number of jobs that can be processed per batch. Each operation is assigned
to a family and only operations of the same family can be combined in the same batch. For
each job, we are given a ready date and a due date. Those constraints describe a flexible
job-shop scheduling problem with batching. We aim to minimize total weighted tardiness.
For the described problem, we present a simulated annealing algorithm that is based on an
extended evaluation of disjunctive graphs. In our proposed approach, batching decisions are
taken dynamically during graph traversal.
[1]
John W. Fowler,et al.
Heuristic scheduling of jobs on parallel batch machines with incompatible job families and unequal ready times
,
2005,
Comput. Oper. Res..
[2]
Scott J. Mason,et al.
Scheduling complex job shops using disjunctive graphs: A cycle elimination procedure
,
2003
.
[3]
M. Mathirajan,et al.
A literature review, classification and simple meta-analysis on scheduling of batch processors in semiconductor
,
2006
.
[4]
Stéphane Dauzère-Pérès,et al.
A batching and scheduling algorithm for the diffusion area in semiconductor manufacturing
,
2012
.
[5]
Stéphane Dauzère-Pérès,et al.
Flexible job-shop scheduling with extended route flexibility for semiconductor manufacturing
,
2014,
Proceedings of the Winter Simulation Conference 2014.