Metrology for the Advancement of X-ray Optics at the ALS

When it comes to building short-wavelength optical systems to control light at the nano-scale, metrology is the foundation, and accuracy is the bedrock. An inescapable truth in our field is that the most highly specified optical elements are wildly aberrated when just slightly misaligned, whether that misalignment comes from surface-figure or mirror-placement errors, imperfect bending, thermal drift, vibration, or other various anomalies.

[1]  Erik Anderson.  Development of near atomically perfect diffraction gratings for EUV and soft x-rays with very high efficiency and resolving power , 2013 .

[2]  Valeriy V. Yashchuk,et al.  Experimental methods for optimal tuning of bendable mirrors for diffraction-limited soft x-ray focusing , 2013 .

[3]  Samuel K. Barber,et al.  Characterization of electron microscopes with binary pseudo-random multilayer test samples , 2011 .

[4]  Gregory Y. Morrison,et al.  Methodology for optimal in situ alignment and setting of bendable optics for nearly diffraction-limited focusing of soft x-rays , 2013 .

[5]  Valeriy V. Yashchuk,et al.  Binary Pseudo-random Grating Standard for Calibration of Surface Profilometers , 2008 .

[6]  Samuel K. Barber,et al.  Binary pseudo-random gratings and arrays for calibration of modulation transfer functions of surface profilometers , 2010 .

[7]  E. H. Anderson,et al.  Ultra-high efficiency multilayer blazed gratings through deposition kinetic control. , 2012, Optics letters.

[8]  Samuel K. Barber,et al.  Calibration of the modulation transfer function of surface profilometers with binary pseudorandom test standards: expanding the application range to Fizeau interferometers and electron microscopes , 2011 .

[9]  Samuel K. Barber,et al.  Sub-microradian surface slope metrology with the ALS Developmental Long Trace Profiler , 2009 .

[10]  Sheng Yuan,et al.  Elliptically Bent X-ray Mirrors with Active Temperature Stabilization - eScholarship , 2010 .

[11]  Iacopo Mochi,et al.  Cross-check of ex-situ and in-situ metrology of a bendable temperature stabilized KB mirror , 2010 .

[12]  Erik H. Anderson,et al.  Nanofabrication and diffractive optics for high-resolution x-ray applications , 2000 .

[13]  Valeriy V. Yashchuk,et al.  Optimal tuning and calibration of bendable mirrors with slope-measuring profilers , 2009 .

[14]  Valeriy V. Yashchuk,et al.  Reliable before-fabrication forecasting of expected surface slope distributions for x-ray optics , 2012 .

[15]  Ruth H. Pater,et al.  Nuclear Instruments and Methods in Physics Research. Section B; Microstructural Characterization of Semi-Interpenetrating Polymer Networks by Positron Lifetime Spectroscopy , 1998 .

[16]  Josep Nicolas,et al.  Characterization of the error budget of Alba-NOM , 2013 .

[17]  Frank Siewert,et al.  Upgrade of long trace profiler for characterization of high-precision X-ray mirrors at SPring-8 , 2010 .

[18]  Samuel K. Barber,et al.  Stability of modulation transfer function calibration of surface profilometers using binary pseudo-random gratings and arrays with nonideal groove shapes , 2010 .

[19]  T. Warwick,et al.  Conformal growth of Mo/Si multilayers on grating substrates using collimated ion beam sputtering , 2012 .

[20]  W. Chao,et al.  Real space soft x-ray imaging at 10 nm spatial resolution. , 2012, Optics express.

[21]  E. Gaviola.  On the Quantitative Use of the Foucault Knife-Edge Test , 1936 .

[22]  D. L. Voronov,et al.  High-efficiency 5000 lines/mm multilayer-coated blazed grating for extreme ultraviolet wavelengths. , 2010, Optics letters.

[23]  Xavier Levecq,et al.  Automatic alignment of a Kirkpatrick-Baez active optic by use of a soft-x-ray Hartmann wavefront sensor. , 2006, Optics letters.

[24]  Valeriy V Yashchuk,et al.  Optimal measurement strategies for effective suppression of drift errors. , 2009, The Review of scientific instruments.

[25]  Kenneth A. Goldberg,et al.  Extreme ultraviolet carrier-frequency shearing interferometry of a lithographic four-mirror optical system , 2000 .

[26]  Mourad Idir,et al.  Modern developments in X-ray and neutron optics , 2008 .

[27]  Kenneth A. Goldberg,et al.  X-ray beam metrology and x-ray optic alignment by Hartmann wavefront sensing , 2005, SPIE Optics + Photonics.

[28]  Frank Siewert,et al.  The Diamond-NOM: A non-contact profiler capable of characterizing optical figure error with sub-nanometre repeatability , 2010 .

[29]  Valeriy V. Yashchuk,et al.  Ex situ metrology of x-ray diffraction gratings - eScholarship , 2013 .