A NEW FAMILY OF HIGH PRESSURE THICK FILM SENSORS

In the last few years a strong request has arisen for higher pressure devices for automotive, where the range seems to be limited to 100 bar, and for other applications, where the range might be up to 500 bar. After a short recall of the principle on which the thick film pressure sensor is based, this paper examines the concept used to develop the high pressure devices and the criteria for their mass production while still keeping the high quality level of performance of the already widely used low pressure sensors.