Modeling and Parameter Identification of the Ultra-precision Vibration Isolation System

In this paper,according to the internal structure of the ultra-precision vibration isolator and the arrangement of the isolation system,dynamics model of the ultra-precision vibration isolation system is established.And on this basis,theoretical frequency response function is derived.The method of vibration isolation system frequency response test is proposed,and the initial value of dynamic parameters of the isolation system is calculated,according to the eigenvalue of the test data.Parameter adjustment method is used to continuously pressing the theoretical frequency response curve of experimental frequency response curve,and to identify the dynamic parameters of the isolation system.Experiments and error analysis results show the effectiveness of the dynamic model and the credibility of the identified parameters.