Abstract Interferometric developments which improve the performance of the laser interferometer as a position sensing device are described. The double pass attachment is an optical accessory which doubles the resolution of the Hewlett-Packard linear and plane mirror interferometers. Unlike previous attempts to extend resolution optically, this device does not fold just one of the two interfering beams and hence does not introduce error due to its own motion. Simple addition of a quarter wave plate to the attachment gives a differential version of the plane mirror interferometer. Various configurations of this differential interferometer, and their application to machine tools and to integrated circuit lithographic and inspection equipment, are discussed. A new ‘wavelength tracking’ device, based on differential interferometry, directly and precisely monitors changes in laser wavelength inside a highly stable mechanical cavity. Easily incorporated as an additional interferometer axis, the device improves compensation for changes in laser wavelength.
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