Polysilicon electrostatic micromotors using stator/rotor contact interactions are particularly studied. New mechanical architectures involving flexible components (e.g.the stator andlor the rotor) are proposed. The components are designed in order to allow the cooperation and the driving force superposition of arrayed direct drive actuators . Scratch drive actuators combining active frictional contact mechanisms and electrostatic actuation are analyzed, according to their ability to develop high torquefiow speed characteristics. Millimeter size tubular electrostatic micrometers are investigated using an hybrid fabrication process.