论文信息 - Oxide Impurities in Silicon Oxide Intermetal Dielectrics and Their Potential to Elevate Via-Resistances - 字舞流文

Oxide Impurities in Silicon Oxide Intermetal Dielectrics and Their Potential to Elevate Via-Resistances

N. D. Theodore | P. Fejes | W. Qin | A. Elkind | Donavan Alldredge | D. Heleotes | M. Vadipour | Bill Godek | N. Lerner | N. Theodore