Challenges in line edge roughness metrology in directed self-assembly lithography: placement errors and cross-line correlations
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Evangelos Gogolides | Vassilios Constantoudis | Hari Pathangi | Roel Gronheid | Alessandro Vaglio Pret | George Papavieros | A. V. Pret | R. Gronheid | G. Papavieros | E. Gogolides | V. Constantoudis | H. Pathangi
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