论文信息 - Optimization of process parameters for sputtering of ceramic ZnO:Al2O3 targets for a-Si:H/μc-Si:H solar cells - 字舞流文

Optimization of process parameters for sputtering of ceramic ZnO:Al2O3 targets for a-Si:H/μc-Si:H solar cells

B. Szyszka | C. Jacobs | V. Sittinger | W. Werner | W. Dewald