论文信息 - Modular deposition chamber for in situ X-ray experiments during RF and DC magnetron sputtering. - 字舞流文

Modular deposition chamber for in situ X-ray experiments during RF and DC magnetron sputtering.

S. Ulrich | T. Baumbach | R. Weigel | B. Krause | M. Kaufholz | M. Mantilla | S. Darma | Hans Hellmuth Gräfe | S. Rembold