A novel junctionless FinFET structure with sub-5nm shell doping profile by molecular monolayer doping and microwave annealing
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P. Sung | K. Kao | Y. Lee | T. Chao | W. Wu | W. Yeh | T. Buyuklimanli | J. Shieh | F. Hsueh | M. Current | Y. Li | Ta-Chun Cho | P. Huang | J. Marino | Shu‐Han Hsu | C. Wu | W. Huang | H.C. Chen | B. Hengstebeck