论文信息 - Closed-loop measurement of equipment efficiency and equipment capacity

Closed-loop measurement of equipment efficiency and equipment capacity

Formal definitions for the components of efficiency and capacity, mathematical formulas for computing overall efficiency, and data collection strategies are proposed for rigorous measurement of equipment efficiency and equipment capacity. Measurement of overall equipment efficiency (OEE) under the TPM paradigm is extended to support the maintenance of capacity parameters for production planning. The weaknesses or equipment analyzes based on utilization and aggregate UPH (units per hour) figures are contrasted against the robustness of the proposed approach. Applications in semiconductor factories are discussed.

Robert C. Leachman

[1] Lawrence M. Wein,et al. Scheduling semiconductor wafer fabrication , 1988 .

[2] Mauricio G. C. Resende,et al. Closed-loop job release control for VLSI circuit manufacturing , 1988 .

[3] Robert C. Leachman,et al. Optimized production planning and delivery quotation for the semiconductor industry , 1994 .

[4] Robert C. Leachman,et al. On Capacity Modeling for Production Planning with Alternative Machine Types , 1992 .

[5] Robert C. Leachman. Closed-loop measurement of equipment efficiency and equipment capacity , 1995, Proceedings of SEMI Advanced Semiconductor Manufacturing Conference and Workshop.

[6] Robert C. Leachman,et al. IMPReSS: An Automated Production-Planning and Delivery-Quotation System at Harris Corporation-Semiconductor Sector , 1996 .