A Newly Developed Linear Motor-Driven Aerostatic X-Y Planar Motion Table System for Nano-Machining
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[1] Hisayoshi Sato,et al. Nanometer Positioning of a Linear Motor-Driven Ultraprecision Aerostatic Table System with Electrorheological Fluid Dampers , 1999 .
[2] Hidenori Shinno,et al. High Speed Nanometer Positioning Using a Hybrid Linear Motor , 2001 .
[3] Hayato Yoshioka,et al. Sensor-less Monitoring of Cutting Force during Ultraprecision Machining , 2003 .
[4] Tadahiko Shinshi,et al. X-Y-θ Nano-Positioning Table System for a Mother Machine , 2004 .
[5] Eiji Shamoto,et al. Rigid XYθ Table for Ultraprecision Machine Tool Driven by Means of Walking Drive , 1997 .
[6] David L. Trumper,et al. Magnetic bearing stage for photolithography , 1993 .
[7] Mark Versteyhe,et al. A Nanometre-precision, Ultra-stiff Plezostepper Stage for ELID-grinding , 2003 .