论文信息 - Effects of the inductively coupled Ar plasma etching on the performance of (111) face CdZnTe detector - 字舞流文

Effects of the inductively coupled Ar plasma etching on the performance of (111) face CdZnTe detector

Linjun Wang | J. Min | X. Liang | Jijun Zhang | B. Song | J. Lai | Shuhao Zhao | Haozhi Shi