论文信息 - Convective Gas Gyroscope Based on Thermo-Resistive Effect in Si P-N Junction

Convective Gas Gyroscope Based on Thermo-Resistive Effect in Si P-N Junction

Convective gas gyroscope based on thermo-resistive effect in Si p-n junction was presented. The p-n junction thermistor, which has very high temperature sensitivity and accuracy, has been utilized as the sensing element. The fabricated p-n junction has the temperature coefficient of resistance (TCR) of 10 times larger and resistance of 20 times lower than those of the silicon thermistor. The lower resistance reduces the thermal noise while the higher value of TCR increases the sensitivity. The measured sensitivities for the X-axis and Y-axis were 28 mV/deg/sec and 27.72 mV/deg/sec, respectively. The cross sensitivity and angular error between flow axis and input axis is measured to be 1%FS and 1.5%FS, respectively. Non-linearity was measured to be smaller than 0.07%F.S.

T. Shiozawa | S. Sugiyama | D. Dao | V. Dau

[1] H. Kumagai,et al. Development of a dual-axis thermal convective gas gyroscope , 2006 .

[2] T. Shiozawa,et al. Adual Axis Gas Gyroscope Based on Convective and Thermo-Resistive Effects in Silicon with Low Thermal-Induced Stress Sensing Element , 2006, 19th IEEE International Conference on Micro Electro Mechanical Systems.

[3] H. Kumagai,et al. A dual axis gas gyroscope utilizing low-doped silicon thermistor , 2005, 18th IEEE International Conference on Micro Electro Mechanical Systems, 2005. MEMS 2005..

[4] Mitsuteru Kimura,et al. Thermistor-like pn junction temperature-sensor with variable sensitivity and its combination with a micro-air-bridge heater , 2003 .

[5] S. Sugiyama,et al. Analysis of piezoresistance in p-type silicon for mechanical sensors , 2002 .

[6] W. Rindner,et al. Resistance of Elastically Deformed Shallow p‐n Junctions. II , 1962 .