Characterization of Boron Carbonitride (BCN) Thin Films Deposited by Radiofrequency and Microwave Plasma Enhanced Chemical Vapor Deposition
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Md. Abdul Mannan | Tetsuya Kida | Yuji Baba | M. Nagano | T. Kida | M. Mannan | Y. Baba | Masamitsu Nagano | K. Shigezumi | Norie Hirao | N. Hirao | K. Shigezumi
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