A high-voltage CMOS VLSI programmable fluidic processor chip

A high-voltage (HV) SOI CMOS VLSI chip has been demonstrated to transport droplets on programmable paths across its coated surface. This HV exciter for a fluidic lab-on-a-chip system creates dielectrophoretic forces that move and help inject droplets. Electrode excitation voltage and frequency are variable: at 100V, f/sub ELECmax/ = 200Hz. Data communication rate is variable up to 250kHz. This 10,377/spl mu/m-by-8210/spl mu/m demonstration chip has a 32/spl times/32 array of nominally 100V electrode drivers dissipating 1.87W max.

[1]  Y. Huang,et al.  Dielectrophoretic separation of cancer cells from blood , 1995, IAS '95. Conference Record of the 1995 IEEE Industry Applications Conference Thirtieth IAS Annual Meeting.

[2]  Peter R. C. Gascoyne,et al.  A Programmable Dielectrophoretic Fluid Processor for Droplet-Based Chemistry , 2001 .

[3]  K.V.I.S. Kaler,et al.  DEP based cell separation utilizing planar microelectrode array , 2002, Annual Report Conference on Electrical Insulation and Dielectric Phenomena.

[4]  G.A. Jullien,et al.  A SoC bio-analysis platform for real-time biological cell analysis-on-a-chip , 2003, The 3rd IEEE International Workshop on System-on-Chip for Real-Time Applications, 2003. Proceedings..

[5]  N. Manaresi,et al.  A CMOS chip for individual cell manipulation and detection , 2003, 2003 IEEE International Solid-State Circuits Conference, 2003. Digest of Technical Papers. ISSCC..

[6]  Peter R C Gascoyne,et al.  Dielectrophoresis-based programmable fluidic processors. , 2004, Lab on a chip.