Finite element analysis of the piezoelectric vibrations of quartz plate resonators with higher-order plate theory

A finite element formulation of the vibrations of piezoelectric quartz resonators based on Mindlin plate theory is derived. The higher-order plate theory is employed for the development of a collection of successively higher-order plate elements which can be effective for a broad frequency range including the fundamental and overtone modes of thickness-shear vibrations. The presence of electrodes is also considered for its mechanical effects. The mechanical displacements and electric potential are combined into a generalized displacement field, and the subsequent derivations are carried out with all the generalized equations. Through standard finite element procedure, the vibration frequency and vibration mode shapes including the electric potential distribution are obtained. The frequency spectra is compared with some well-known experimental results with good agreement. Our previous experience with finite element analysis of high frequency quartz plate vibrations leads us to believe that memory and computing time will always remain as key issues despite the advances in computers. Hence, the use of sparse matrix techniques, efficient eigenvalue solvers, and other reduction procedures are explored.

[1]  Raymond D. Mindlin,et al.  High Frequency Vibrations of Plated, Crystal Plates , 1989 .

[2]  Y. Yong,et al.  Three-dimensional Finite Element Solution of the Lagrangian Equations for the Frequency-Temperature Behavior of Y-Cut and NT-Cut Bars , 1986, 40th Annual Symposium on Frequency Control.

[3]  J. T. Stewart,et al.  Three dimensional finite element modeling of quartz crystal strip resonators , 1997, Proceedings of International Frequency Control Symposium.

[4]  J. Wang,et al.  A set of hierarchical finite elements for quartz plate resonators , 1996, 1996 IEEE Ultrasonics Symposium. Proceedings.

[5]  I. Koga Radio‐Frequency Vibrations of Rectangular AT‐Cut Quartz Plates , 1963 .

[6]  C. Gehin,et al.  Mounting characterization of a piezoelectric resonator using FEM , 1997, Proceedings of International Frequency Control Symposium.

[7]  Z. Zhang,et al.  Numerical analysis of thickness shear thin film piezoelectric resonators using a laminated plate theory , 1995, IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control.

[8]  Z. Zhang,et al.  On the accuracy of plate theories for the prediction of unwanted modes near the fundamental thickness shear mode , 1995, Proceedings of the 1995 IEEE International Frequency Control Symposium (49th Annual Symposium).

[9]  R. Lerch,et al.  Optical voltage sensor based on a quartz resonator , 1996, 1996 IEEE Ultrasonics Symposium. Proceedings.

[10]  H. F. Tiersten,et al.  Linear Piezoelectric Plate Vibrations , 1969 .

[11]  P. Plassmann,et al.  Thermal effects on the frequency response of piezoelectric crystals , 1992 .

[12]  J. T. Stewart,et al.  Thickness-shear mode shapes and mass-frequency influence surface of a circular and electroded AT-cut quartz resonator , 1991, IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control.

[13]  T. Hughes,et al.  Finite element method for piezoelectric vibration , 1970 .

[14]  Raymond D. Mindlin,et al.  Frequencies of piezoelectrically forced vibrations of electroded, doubly rotated, quartz plates , 1984 .

[15]  Ji Wang,et al.  Vibrations of AT‐cut quartz strips of narrow width and finite length , 1994 .

[16]  Yasuaki Watanabe,et al.  Two-dimensional analysis of thickness-shear and flexural vibrations in rectangular AT-cut quartz plates using a one-dimensional finite element method , 1990, 44th Annual Symposium on Frequency Control.

[17]  Yook-Kong Yong,et al.  Third-order Mindlin plate theory predictions for the frequency-temperature behavior of straight crested wave modes in AT- and SC-cut quartz plates , 1996, Proceedings of 1996 IEEE International Frequency Control Symposium.

[18]  R. D. Mindlin,et al.  Strong resonances of rectangular AT-cut quartz plates , 1989 .

[19]  Y. Yong,et al.  Numerical algorithms and results for SC-cut quartz plates vibrating at the third harmonic overtone of thickness shear , 1994, IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control.

[20]  Z. Zhang,et al.  Accuracy of crystal plate theories for high-frequency vibrations in the range of the fundamental thickness shear mode , 1996, IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control.

[21]  Z. Zhang,et al.  A perturbation method for finite element modeling of piezoelectric vibrations in quartz plate resonators , 1993, IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control.

[22]  Y K Yong Three-Dimensional Finite-Element Solution of the Lagrangean Equations for the Frequency-Temperature Behavior of Y-Cut and NT-Cut Bars. , 1987, IEEE transactions on ultrasonics, ferroelectrics, and frequency control.

[23]  Eishi Momosaki,et al.  The application of piezoelectricity to watches , 1982 .

[24]  Mark T. Jones,et al.  Solution of large, sparse systems of linear equations in massively parallel applications , 1992, Proceedings Supercomputing '92.

[25]  Ji Wang,et al.  The piezoelectrically forced vibrations of AT-cut quartz strip resonators , 1997 .

[26]  Y. Yong,et al.  Characteristics of a Lagrangian, high-frequency plate element for the static temperature behavior of low-frequency quartz resonators , 1988, IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control.

[27]  Young-Sam Cho,et al.  NUMERICAL ALGORITHMS FOR SOLUTIONS OF LARGE EIGENVALUE PROBLEMS IN PIEZOELECTRIC RESONATORS , 1996 .

[28]  Raymond D. Mindlin,et al.  High frequency vibrations of piezoelectric crystal plates , 1972 .

[29]  Stavros Syngellakis,et al.  A two‐dimensional theory for high‐frequency vibrations of piezoelectric crystal plates with or without electrodes , 1987 .

[30]  J. T. Stewart,et al.  Mass-frequency influence surface, mode shapes, and frequency spectrum of a rectangular AT-cut quartz plate , 1991, IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control.

[31]  M. Tang,et al.  Initial Stress Field and Resonance Frequencies of Incremental Vibrations in Crystal Resonators by Finite Element Method , 1986, 40th Annual Symposium on Frequency Control.

[32]  Steve Beeby,et al.  Modelling and optimization of micromachined silicon resonators , 1995 .

[33]  J. Soderkvist Using FEA to treat piezoelectric low-frequency resonators , 1998, IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control.