Development of a Precision Parallel Micro-mechanism for Nano Tele-operation

There is an urgent demand for nano level tele-operating system to carry out three-dimensional high-speed micro manipulations for medical and biotechnological applications. In this paper, we designed a precision parallel micro-mechanism driven by piezo actuators (PZT) as the operating robot with 6 DOF, a movement range of 20 mum, and a resolution of less than 20 nm. Also, we presented the conceptual design, synthesis, control strategy, and evaluation for the precision parallel micro-mechanism. The experimental results indicate that the developed parallel micro-mechanism can be used to manipulate micro-objects at high speed and with high precision.

[1]  Dasgupta Bhaskar,et al.  A Newton-Euler formulation for the inverse dynamics of the Stewart platform manipulator , 1998 .

[2]  Fumihito Arai,et al.  High speed random separation of microobject in microchip by laser manipulator and dielectrophoresis , 2000, Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308).

[3]  Lung-Wen Tsai,et al.  Robot Analysis and Design: The Mechanics of Serial and Parallel Manipulators , 1999 .

[4]  Fumihito Arai,et al.  3D viewpoint selection and bilateral control for bio-micromanipulation , 2000, Proceedings 2000 ICRA. Millennium Conference. IEEE International Conference on Robotics and Automation. Symposia Proceedings (Cat. No.00CH37065).

[5]  D. Stewart,et al.  A Platform with Six Degrees of Freedom , 1965 .

[6]  J. Edward Colgate,et al.  A high performance 6-DOF haptic Cobot , 2004, IEEE International Conference on Robotics and Automation, 2004. Proceedings. ICRA '04. 2004.

[7]  Alain Codourey,et al.  Visual control of a microrobot operating under a microscope , 1996, Proceedings of IEEE/RSJ International Conference on Intelligent Robots and Systems. IROS '96.

[8]  G. Fedder,et al.  Laminated high-aspect-ratio microstructures in a conventional CMOS process , 1996, Proceedings of Ninth International Workshop on Micro Electromechanical Systems.

[9]  Fumihito Arai,et al.  Calibration for contact type of micro-manipulation , 1999, Proceedings 1999 IEEE/RSJ International Conference on Intelligent Robots and Systems. Human and Environment Friendly Robots with High Intelligence and Emotional Quotients (Cat. No.99CH36289).

[10]  Tatsuo Arai,et al.  Development of a micro-manipulation system having a two-fingered micro-hand , 1999, IEEE Trans. Robotics Autom..

[11]  Shuxiang Guo,et al.  A human scale tele-operating system for microoperation , 2001, Proceedings 2001 IEEE International Symposium on Computational Intelligence in Robotics and Automation (Cat. No.01EX515).

[12]  Masaru Uchiyama,et al.  A New Design of a 6-DOF Parallel Robot , 1990, J. Robotics Mechatronics.

[13]  L. W. Tsai,et al.  Robot Analysis: The Mechanics of Serial and Parallel Ma-nipulators , 1999 .

[14]  Jerome Carlier,et al.  Virtual reality and high-accuracy vision feedback as key information for microrobot telemanipulation , 1996, Other Conferences.

[15]  K. Sugimoto,et al.  Synthesis of Parallel Micromanipulators , 1989 .