Comparison of laser voltage probing and mapping results in oversized and minimum size devices of 120 nm and 65 nm technology

Abstract Laser voltage probing (LVP) provides signal levels from circuit nodes through the backside of integrated circuits. Previous investigations presented voltage sweeping and modulation mapping, based on CW (continuous wave) 1319 nm laser. In this paper, large device structures have been compared with results of measurements on sub-micron devices – having nominal gate lengths and widths – including a ring oscillator (RO). All signals were obtained with a spectrum analyzer, requiring no internal trigger signals from the circuitry. On ROs, frequency shifts due to the thermal stimulation effect could be determined. Furthermore, a new measurement scheme for sign measurements of LVP signals is introduced.

[1]  Mario Paniccia,et al.  Novel optical probing technique for flip chip packaged microprocessors , 1998, Proceedings International Test Conference 1998 (IEEE Cat. No.98CH36270).

[2]  Erich Gornik,et al.  Heterodyn interferometer for the detection of electric and thermal signals in integrated circuits through the substrate , 1993 .

[3]  S. Kasapi,et al.  Time-resolved photon counting system based on a Geiger-mode InGaAs/InP APD and a solid immersion lens , 2003, The 16th Annual Meeting of the IEEE Lasers and Electro-Optics Society, 2003. LEOS 2003..

[4]  C. Boit,et al.  Quantitative Investigation of Laser Beam Modulation in Electrically Active Devices as Used in Laser Voltage Probing , 2007, IEEE Transactions on Device and Materials Reliability.

[5]  Chris Shaw,et al.  Benefits of phase interference detection to IC waveform probing , 2001, Proceedings 10th Asian Test Symposium.

[6]  C. Boit,et al.  Investigation of Laser Voltage Probing Signals in CMOS Transistors , 2007, 2007 IEEE International Reliability Physics Symposium Proceedings. 45th Annual.

[7]  U. Keller,et al.  VB-3 noninvasive optical sheet charge density probe for silicon integrated circuits , 1986, IEEE Transactions on Electron Devices.

[8]  Mario J. Paniccia,et al.  Laser voltage probe (LVP): a novel optical probing technology for flip-chip packaged microprocessors , 1999, Proceedings of the 1999 7th International Symposium on the Physical and Failure Analysis of Integrated Circuits (Cat. No.99TH8394).

[9]  R. Soref,et al.  Electrooptical effects in silicon , 1987 .