论文信息 - Influence of rapid thermal annealing on the wafer warpage in 3D NAND flash memory - 字舞流文

Influence of rapid thermal annealing on the wafer warpage in 3D NAND flash memory

Sen Zhang | Z. Huo | Xingqi Zou | Yu Zhang | Jing Gao | Chuan Yang | Zhipeng Wu | Qi Li | Lei Ding | Na Li