Interaction of evaporated palladium and titanium films with single-crystal silicon

[1]  M. Nicolet,et al.  Electrical characteristics of palladium silicide , 1978 .

[2]  P. Ghate,et al.  Metallization in microelectronics , 1977 .

[3]  M. Nicolet,et al.  Chromium thin film as a barrier to the interaction of Pd2Si with Al , 1977 .

[4]  M. Nicolet,et al.  Formation kinetics of CrSi2 films on Si substrates with and without interposed Pd2Si layer , 1976 .

[5]  P. Lemieux,et al.  Behavior of various silicon Schottky barrier diodes under heat treatment , 1976 .

[6]  Rodger M. Walser,et al.  First phase nucleation in silicon–transition‐metal planar interfaces , 1976 .

[7]  Y. Nakamura,et al.  Solid state reactions in titanium thin films on silicon , 1976 .

[8]  G. Robinson,et al.  A study of Pd2Si films on silicon using Auger electron spectroscopy , 1976 .

[9]  M. Nicolet,et al.  Identification of the dominant diffusing species in silicide formation , 1974 .

[10]  W. Chu,et al.  Evaluation of glancing angle X-ray diffraction and MeV 4He backscattering analyses of silicide formation☆ , 1974 .

[11]  J. W. Mayer,et al.  Kinetics of silicide formation by thin films of V on Si and SiO2 substrates , 1974 .

[12]  W. F. V. D. Weg,et al.  Characterization of polycrystalline layers by channelling measurements , 1973 .

[13]  R. E. Scott,et al.  Formation kinetics and structure of Pd2Si films on Si , 1973 .

[14]  G. Hutchins,et al.  The growth and transformation of Pd2Si on (111), (110) and (100) Si , 1973 .

[15]  Robert W. Bower,et al.  Characteristics of aluminum‐titanium electrical contacts on silicon , 1973 .

[16]  W. Buckley,et al.  Structure and electrical characteristics of epitaxial palladium silicide contacts on single crystal silicon and diffused P-N diodes , 1972 .

[17]  James W. Mayer,et al.  Growth Kinetics Observed in the Formation of Metal Silicides on Silicon , 1972 .

[18]  R. F. Broom,et al.  Doping dependence of the barrier height of palladium-silicide Schottky-diodes , 1971 .

[19]  H. Fischer,et al.  Electrochemically passivated contacts for silicon solar cells , 1971 .

[20]  C. J. Kircher,et al.  Metallurgical properties and electrical characteristics of palladium silicide-silicon contacts , 1971 .

[21]  C. Burrus,et al.  Planar millimeter-wave epitaxial silicon Schottky-barrier converter diodes , 1968 .