论文信息 - Surface micromachined three-dimentional solenoid-type inductor

Surface micromachined three-dimentional solenoid-type inductor

Miniaturized integrated inductor of high performance is very important in mobile communications and microwave integrated circuits. Existing on-chip spiral inductors based on conventional planar integrated-circuit fabrication technology suffer from substrate loss and parasitics, and have relatively large area. In this paper, We present the design, fabrication, and performance of surface micromachined on-chip three-dimentional (3-D) air-core solenoid microinductors. The fabricated microinductors are characterized at high frequencies from S-parameter measurements. The resulting 7-turn air-core solenoid inductors have inductances between 1.03 to 1.81 nH, peak quality (Q) factors between 19.1 to 38.0 at peak-Q frequencies between 4.4 to 6.0 GHz, and self-resonant frequencies between 10.5 and 13.0 GHz.

Wen Ding | Xiaolin Zhao | Yong Zhou | Xi-Ning Wang | Dong-Ming Fang

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