Effects of Al doping and annealing on chemical states and band diagram of Y2O3∕Si gate stacks studied by photoemission and x-ray absorption spectroscopy
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T. Chikyow | Yun Sun | Shiyu Sun | D. Lee | P. Pianetta | M. Oshima | S. Toyoda | D. Kukuruznyak | J. Okabayashi | M. Komatsu