论文信息 - Low temperature microwave annealed FinFETs with less Vth variability - 字舞流文

Low temperature microwave annealed FinFETs with less Vth variability

P. Sung | Y. Lee | K. Endo | T. Matsukawa | S. O'Uchi | M. Masahara | J. Tsukada | H. Yamauchi | Y. Ishikawa | Y. Liu | F. Hsueh