Electron‐transport, ionization, attachment, and dissociation coefficients in SF6 and its mixtures

An improved set of electron‐collision cross sections is derived for SF6 and used to calculate transport, ionization, attachment, and dissociation coefficients for pure SF6 and mixtures of SF6 with N2, O2, and Ne. The SF6 cross sections differ from previously published sets primarily at very low and high electron energies. At energies below 0.03 eV the attachment cross section is adjusted to fit recent electron swarm experiments, while the elastic momentum transfer cross section is increased to the theoretical limit. At high energies an allowance is made for the excitation of highly excited levels as observed in electron beam experiments. The cross‐section sets used for the admixed gases have previously been published. Electron kinetic energy distributions computed from numerical solutions of the electron‐transport (Boltzmann) equation using the two‐term, spherical harmonic expansion approximation were used to obtain electron‐transport and reaction coefficients as functions of E/N and the fractional concen...

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