Preparation of siloxane–silsesquioxane hybrid thin films for large‐scale‐integration interlayer dielectrics with excellent mechanical properties and low dielectric constants
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Jin‐Heong Yim | Gwang-Seok Kim | Yi-Yeol Lyu | Seok Chang | S. Mah | J. Hahn | J. Hyeon-Lee | Hyun-Dam Jeong | Jaegeun Park | Yi‐Yeol Lyu