Fracture strength of optical quality and black polycrystalline CVD diamonds

Abstract Three-point method has been used to measure bending strength σf of optical quality and opaque polycrystalline diamond films with thickness in the broad range of h = 0.06–1.0 mm grown by microwave plasma CVD. The free-standing films were characterized with microRaman spectroscopy, SEM, and optical profilography. For transparent samples the value of σf is found to approach 2200 MPa for thinnest sample when the substrate side is under tensile stress, reducing with film thickness to 600 MPa at h ≈ 1000 μm, while for substrate side under the tension exhibits the strength a factor of two lower. The material tested shows transcrystallite fracture and the strength increase with grain size reduction. Also evaluated are Young modulus E = 1072 ± 153 GPa, and the Weibull moduli m = 6.4 and m = 4.5 for the growth and substrate sides under tension, respectively. In contrast, the (100) textured black diamond films with pronounced columnar structure demonstrate intergranular fracture mode due to relatively weak (with non-diamond carbon component) grain boundaries, lower fracture surface roughness, and the two times lower strength compared to the “white” diamond.

[1]  R. Singer,et al.  Self-supporting nanocrystalline diamond foils: Influence of template morphologies on the mechanical properties measured by ball on three balls testing , 2011 .

[2]  V. Ralchenko,et al.  Distribution in angular mismatch between crystallites in diamond films grown in microwave plasma , 2010 .

[3]  C. Pickles,et al.  Strength of free-standing chemically vapour-deposited diamond measured by a range of techniques , 2003 .

[4]  C. Klein Diamond windows and domes: flexural strength and thermal shock , 2002 .

[5]  Derrick C. Mancini,et al.  Ultrananocrystalline diamond thin films for MEMS and moving mechanical assembly devices , 2001 .

[6]  G. C. Chen,et al.  Microstructure and fracture strength of different grades of freestanding diamond films deposited by a DC Arc Plasma Jet process , 2005 .

[7]  M. Matthewson,et al.  Mechanical properties of ceramics , 1996 .

[8]  Manfred Thumm,et al.  MPACVD-diamond windows for high-power and long-pulse millimeter wave transmission , 2001 .

[9]  D. Wiechert,et al.  Post-depositional diamond etching , 1993 .

[10]  V. Ralchenko,et al.  Stress mapping of chemical-vapor-deposited diamond film surface by micro-Raman spectroscopy , 1997 .

[11]  R. S. Sussmann,et al.  Optical performance of chemically vapour-deposited diamond at infrared wavelengths , 2000 .

[12]  H. Espinosa,et al.  Fracture strength of ultrananocrystalline diamond thin films—identification of Weibull parameters , 2003 .

[13]  C. Pickles The fracture stress of chemical vapour deposited diamond , 2002 .

[14]  Z. Jiang,et al.  Accurate measurement of strength and fracture toughness for miniature-size thick diamond-film samples by three-point bending at constant loading rate , 2001 .

[15]  J. Butler,et al.  Ultrananocrystalline and Nanocrystalline Diamond Thin Films for MEMS/NEMS Applications , 2010 .

[16]  A. V. Khomich,et al.  Thermal conductivity of CVD diamond at elevated temperatures , 2005 .

[17]  T. D. Madgwick,et al.  Chemical vapour deposition synthetic diamond: materials, technology and applications , 2009, Journal of physics. Condensed matter : an Institute of Physics journal.

[18]  J. Butler,et al.  Strain and microstructure variation in grains of CVD diamond film , 1995 .

[19]  V. Ralchenko,et al.  Structure and properties of high-temperature annealed CVD diamond , 2003 .

[20]  K. J. Gray,et al.  Free-standing CVD diamond wafers for thermal management by d.c. arc jet technology , 1999 .

[21]  C. Klein,et al.  Young's modulus and Poisson's ratio of CVD diamond , 1993 .

[22]  A. Omeltchenko,et al.  Atomistic modeling of the fracture of polycrystalline diamond , 2000 .

[23]  L. Jinlong,et al.  The properties of free-standing diamond films after plasma high temperature treatment of the rapid heating☆ , 2011 .