论文信息 - Direct bonding of silicon carbide wafers with a regular relief at the interface - 字舞流文

Direct bonding of silicon carbide wafers with a regular relief at the interface

L. S. Kostina | I. Grekhov | J. Je | P. Ivanov | T. Argunova | T. P. Samsonova | E. Belyakova | T. Samsonova