Micromachined bar-structure gyroscope with high Q-factors for both driving and sensing mode at atmospheric pressure
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Jiwei Jiao | Lufeng Che | Bin Xiong | Linxi Dong | Yuelin Wang | Xinxin Li | Yuelin Wang | B. Xiong | J. Jiao | Lufeng Che | Xinxin Li | Yong Chen | Linxi Dong | Yong Chen
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