Design and Simulation of Push–Pull Capacitive Accelerometer Structure for Navigation Applications

This paper presents the design of capacitive accelerometer in ±10g range suitable for navigational applications. Push pull structure has been chosen and design has been carried out using SOI wafer. Modal studies has been carried out. Simulation results have been presented. The structure exhibits a sensitivity of 33.6 mV/g along with non linearity of 0.0015%. The 3 dB bandwidth of the accelerometer structure is found to be ~235 Hz.