Design of a high-efficiency grating coupler based on a silicon nitride overlay for silicon-on-insulator waveguides.

A waveguide grating coupler based on a silicon nitride overlay at 1.55 μm for TE polarization is designed with no experimental demonstration. Its coupling efficiency for a fiber is 76%, the 1 dB bandwidth is 75 nm, and the coupling angle is 10°. The effects of different device parameters on the coupling performance for the grating coupler are discussed. The coupling efficiency of our grating coupler is almost equal, yet the 1 dB spectral bandwidth is around 25 nm broader, as compared with the grating coupler design based on a poly-silicon overlay. The coupling performance of our coupling device could still be further improved. The grating coupler presented in this paper is applicable to the optical coupling in nanophotonic integrated circuits.

[1]  T. Krauss,et al.  Compact and Highly Efficient Grating Couplers Between Optical Fiber and Nanophotonic Waveguides , 2007, Journal of Lightwave Technology.

[2]  R. Baets,et al.  Grating Couplers for Coupling between Optical Fibers and Nanophotonic Waveguides , 2006 .

[3]  Siegfried Janz,et al.  Waveguide grating coupler with subwavelength microstructures. , 2009, Optics letters.

[4]  R. Baets,et al.  Compact efficient broadband grating coupler for silicon-on-insulator waveguides. , 2004, Optics letters.

[5]  Andrew G. Glen,et al.  APPL , 2001 .

[6]  A. Vonsovici,et al.  Effects of grating heights on highly efficient unibond SOI waveguide grating couplers , 2000, IEEE Photonics Technology Letters.

[7]  Zhiping Zhou,et al.  High efficiency compact grating coupler for integrated optical circuits , 2006, SPIE/OSA/IEEE Asia Communications and Photonics.

[8]  Philippe Lalanne,et al.  Blazed binary diffractive gratings with antireflection coating for improved operation at 10.6 μm , 2004 .

[9]  P. Verheyen,et al.  High-efficiency fiber-to-chip grating couplers realized using an advanced CMOS-compatible silicon-on-insulator platform. , 2010, Optics express.

[10]  J. Marti,et al.  Study of High Efficiency Grating Couplers for Silicon-Based Horizontal Slot Waveguides , 2008, IEEE Photonics Technology Letters.

[11]  Wolfram H. P. Pernice,et al.  Silicon nitride membrane photonics , 2009 .

[12]  Hans Sohlström,et al.  High efficiency silicon nitride surface grating couplers. , 2008, Optics express.

[13]  M. S. Unlu,et al.  Silicon substrates with buried distributed Bragg reflectors for resonant cavity-enhanced optoelectronics , 2002 .

[14]  S. Janz,et al.  A broad-band waveguide grating coupler with a subwavelength grating mirror , 2006, IEEE Photonics Technology Letters.

[15]  Roel Baets,et al.  High efficiency grating coupler between silicon-on-insulator waveguides and perfectly vertical optical fibers. , 2007, Optics letters.

[16]  Bin Wang,et al.  Stratified waveguide grating coupler for normal fiber incidence. , 2005, Optics letters.

[17]  Weidong Zhou,et al.  High efficiency diffractive grating coupler based on transferred silicon nanomembrane overlay on photonic waveguide , 2009 .

[18]  Wim Bogaerts,et al.  How to bring nanophotonics to application - silicon photonics packaging , 2008 .

[19]  T. Krauss,et al.  An out-of-plane grating coupler for efficient butt-coupling between compact planar waveguides and single-mode fibers , 2002 .

[20]  E. Sleeckx,et al.  Highly efficient grating coupler between optical fiber and silicon photonic circuit , 2009, 2009 Conference on Lasers and Electro-Optics and 2009 Conference on Quantum electronics and Laser Science Conference.

[21]  Alexei Chelnokov,et al.  Fiber grating couplers for silicon nanophotonic circuits: Design modeling methodology and fabrication tolerances , 2009 .

[22]  El-Hang Lee,et al.  Design and characterization of an out-of-plane polymer waveguide grating coupler , 2007, SPIE OPTO.

[23]  Novel Grating Design for Out-of-Plane Coupling With Nonuniform Duty Cycle , 2008, IEEE Photonics Technology Letters.

[24]  R. Baets,et al.  High efficiency Silicon-on-Insulator grating coupler based on a poly-Silicon overlay. , 2006, Optics express.

[25]  G. Nordin,et al.  Embedded slanted grating for vertical coupling between fibers and silicon-on-insulator planar waveguides , 2005, IEEE Photonics Technology Letters.

[26]  Hon Ki Tsang,et al.  Fabrication-Tolerant Waveguide Chirped Grating Coupler for Coupling to a Perfectly Vertical Optical Fiber , 2008, IEEE Photonics Technology Letters.