论文信息 - Examination of the Hydrogen Incorporation into Radio Frequency-Sputtered Hydrogenated SiNx Thin Films - 字舞流文

Examination of the Hydrogen Incorporation into Radio Frequency-Sputtered Hydrogenated SiNx Thin Films

P. Petrik | Z. Zolnai | Z. Fogarassy | C. Balázsi | J. Mihály | K. Balázsi | M. Serényi | Nikolett Hegedüs | R. Lovics