Rapid, low-cost fabrication of parylene microchannels for microfluidic applications

This paper presents a rapid and low-cost fabrication method of parylene microchannels, so-called 'parylene micromolding'. Technical aspects of this new method are explored and some example products fabricated by this method are displayed. Among them, meander type channel, long spiral channel, electrophoretic channel, and dielectrophoretic channel are included.

[1]  Y. Tai,et al.  A Parylene micro check valve , 1999 .

[2]  Peter J. Hesketh,et al.  Parylene gas chromatographic column for rapid thermal cycling , 2002 .

[3]  Carlos H. Mastrangelo,et al.  Electrophoresis system with integrated on-chip fluorescence detection , 2000, Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308).

[4]  Y. Tai,et al.  Photoresist as a sacrificial layer by dissolution in acetone , 2001, Technical Digest. MEMS 2001. 14th IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.01CH37090).

[5]  T.N. Pornsin-Sirirak,et al.  Flexible parylene actuator for micro adaptive flow control , 2001, Technical Digest. MEMS 2001. 14th IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.01CH37090).

[6]  Polymer-based electrospray chips for mass spectrometry , 1999, Technical Digest. IEEE International MEMS 99 Conference. Twelfth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.99CH36291).