论文信息 - Method of fabrication of ISFETs and CHEMFETs on an Si-SiO2-Si structure - 字舞流文

Method of fabrication of ISFETs and CHEMFETs on an Si-SiO2-Si structure

A. Poghossian | A. S. Poghossian

[1] M. Esashi,et al. Methods of isfet fabrication , 1981 .

[2] 竜雄秋山,et al. シリコン‐オン‐サファイアを用いたイオン選択性電界効果トランジスターの製作 , 1981 .

[3] N. D. Rooij,et al. A pH-ISFET and an Integrated pH-Pressure Sensor with Back-Side Contacts , 1988 .

[4] T. Sakai,et al. A Backside contact ISFET with a silicon-insulator-silicon structure , 1990 .