论文信息 - Defect engineering in Czochralski silicon by electron irradiation at different temperatures - 字舞流文

Defect engineering in Czochralski silicon by electron irradiation at different temperatures

V. Markevich | B. Svensson | L. Murin | J. Lindström | M. Kleverman | T. Hallberg | J. Hermansson

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