A new method for characterizing nonlinearity in scanning probe microscopes using digital image correlation

It is essential to characterize the nonlinearity in scanning probe microscopes (SPMs) in order to acquire spatial measurements with high levels of accuracy. In this paper, a new characterization method is presented that combines a high-resolution image processing technique used by the experimental mechanics community known as Digital Image Correlation (DIC) with digital images from a standard type of SPM known as an atomic force microscope (AFM). The characterization results using this new method match those from the conventional method using micromachined calibration gratings. However, the new method uses the texture of a specimen surface and not a precisely micromachined calibration grating. As a consequence, the new characterization technique is a more direct method for measuring scanning errors that can be conducted in situ when imaging a specimen surface at any scale within the scanning range of the SPM. It also has the advantage of reconstructing the position error curve more continuously with less noise than the conventional method.