论文信息 - Solid phase epitaxy during Ge condensation from amorphous SiGe layer on silicon-on-insulator substrate - 字舞流文

Solid phase epitaxy during Ge condensation from amorphous SiGe layer on silicon-on-insulator substrate

S. Balakumar | G. Lo | D. Kwong | Sungjoo Lee | N. Balasubramanian | C. Tung | Rakesh Kumar | G. Fei