Analysis and modelling on CMOS spiral inductor with impact of metal dummy fills

This paper focuses on investigating and modelling the impact of dummy fills on the performance of CMOS spiral inductors. A modified π-Model is proposed to account the dummy effect. A spiral inductor is fabricated on 9-metal 65nm CMOS technology. Dummy effect is evaluated through comparisons on parameter values in equivalent circuit model. Experiment shows the modified π-Model provides proper characterization on the inductor with dummy fills.

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