Novel back‐channel‐etch process flow based a‐IGZO TFTs for circuit and display applications on PEN foil
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A. Chasin | G. Groeseneken | P. Heremans | S. Steudel | K. Myny | Jan Genoe | M. Nag | T. Ke | S. Smout | M. Ameys | S. Schols | P. Vicca | M. Willegems | A. Bhoolokam | M. Rockelé | J. Steen