Two-dimensional position detection system with MEMS accelerometer for mouse applications

A hybrid two-dimensional position sensing system is designed for mouse applications. The system measures the acceleration of hand-movements which are converted into two-dimensional location coordinates. The system consists of four major components: 1) MEMS accelerometers, 2) CMOS analog read-out circuitry 3) an acceleration magnitude extraction module, and 4) a 16-bit RISC microprocessor. Mechanical and analog circuit simulation shows that the designed padless mouse system can detect accelerations as small as 5.3 mg and operate up to 18 MHz.

[1]  L.M. Roylance,et al.  A batch-fabricated silicon accelerometer , 1979, IEEE Transactions on Electron Devices.

[2]  K. Najafi,et al.  A low-voltage bulk-silicon tunneling-based microaccelerometer , 1995, Proceedings of International Electron Devices Meeting.

[3]  B. Boser,et al.  Surface micromachined accelerometers , 1995, Proceedings of the IEEE 1995 Custom Integrated Circuits Conference.

[4]  Farrokh Ayazi,et al.  Micromachined inertial sensors , 1998, Proc. IEEE.

[5]  K. J. Gabriel,et al.  Post-CMOS processing for high-aspect-ratio integrated silicon microstructures , 2002 .