A novel way for the synthesis of tin dioxide sol–gel derived thin films: Application to O3 detection at ambient temperature

Abstract This paper deals with the development of SnO 2 -based thin sensitive layers dedicated to ozone detection at ambient temperature. Working at ambient temperature drastically differs from the results reported in literature concerning the need of working at high temperature (about 350 °C) for achieving the detection of ozone using tin-dioxide-based gas sensors. The sensitive layers developed in the framework of this study were elaborated using the sol–gel process following aqueous or organic way. Compared to those obtained from the aqueous way, the layers synthesized following the alcoholic way showed high response to O 3 (58 ppb) when the detection was performed at ambient temperature. The results of the physico-chemical characterization and ozone detection using both layers led to the proposition of an ozone detection mechanism using tin dioxide-based gas sensors.

[1]  Wojtek Wlodarski,et al.  A thin-film sensing element for ozone, humidity and temperature , 2000 .

[2]  G. Korotcenkov,et al.  Comparative Study of SnO2- and In2O3-based Ozone Sensors , 2008 .

[3]  Daren J. Caruana,et al.  Modelling the response of a tungsten oxide semiconductor as a gas sensor for the measurement of ozone , 2002 .

[4]  G. Martinelli,et al.  Two mechanisms of conduction in polycrystalline SnO2 , 2009 .

[5]  Udo Weimar,et al.  Influence on the gas sensor performances of the metal chemical states introduced by impregnation of calcinated SnO2 sol–gel nanocrystals , 2000 .

[6]  John D. Mackenzie,et al.  Thickness and microstructure effects on alcohol sensing of tin oxide thin films , 1996 .

[7]  Ghenadii Korotcenkov,et al.  Thin film SnO2-based gas sensors: Film thickness influence , 2009 .

[8]  Xiaolin Liu,et al.  Characteristics of Sol-Gel SnO2 Films Treated by Ammonia , 2000 .

[9]  N. Hashimoto,et al.  Effect of poly ethylene glycol addition on the microstructure and sensor characteristics of SnO2 thin films prepared by sol–gel method , 2003 .

[10]  A. Grisel,et al.  A new SnO2 low temperature deposition technique for integrated gas sensors , 1993 .

[11]  Dongxiang Zhou,et al.  The sensor response of tin oxide thin films to different gas concentration and the modification of the gas diffusion theory , 2009 .

[12]  Tadashi Takada,et al.  Highly sensitive ozone sensor , 1993 .

[13]  R. Moos,et al.  Nanosized titania derived from a novel sol-gel process for ammonia gas sensor applications , 2011 .

[14]  D. Briggs,et al.  Practical surface analysis: By auger and x-ray photoelectron spectroscopy , 1983 .

[15]  Joseph R. Stetter,et al.  Ozone sensors on the base of SnO2 films deposited by spray pyrolysis , 2007 .

[16]  Wolf-Joachim Fischer,et al.  Tungsten-oxide thin films as novel materials with high sensitivity and selectivity to NO2, O3, and H2S. Part II: Application as gas sensors , 2004 .

[17]  Khalifa Aguir,et al.  Thermal modelling of a WO3 ozone sensor response , 2005 .

[18]  Khalifa Aguir,et al.  Ethanol and ozone sensing characteristics of WO3 based sensors activated by Au and Pd , 2006 .

[19]  Yoshio Kobayashi,et al.  Preparation of tin oxide monolith by the sol-gel method from inorganic salt , 1996, Journal of Materials Science.

[20]  C. Reddy,et al.  Tin dioxide nanoparticles prepared by sol-gel method for an improved hydrogen sulfide sensor , 1999 .

[21]  Yude Wang,et al.  Electrical and gas-sensing properties of mesostructured tin oxide-based H2 sensor , 2002 .

[22]  L. Vasanelli,et al.  CO sensing properties of SnO2 thin films prepared by the sol-gel process , 1997 .

[23]  Jinsoo Park,et al.  Synthesis and high gas sensitivity of tin oxide nanotubes , 2008 .

[24]  S. Kawi,et al.  Synthesis, characterization and sensing application of novel semiconductor oxides. , 1998, Talanta.

[25]  S. Capone,et al.  Nanostructured In2O3-SnO2 sol-gel thin film as material for NO2 detection , 2006 .

[26]  Roderic L. Jones,et al.  Ozone sensors based on WO3: a model for sensor drift and a measurement correction method , 2001 .

[27]  Gyeong-Geun Lee,et al.  A novel process for fabrication of SnO2-based thick film gas sensors , 2007 .

[28]  Ghenadii Korotcenkov,et al.  Ozone measuring: What can limit application of SnO2-based conductometric gas sensors? , 2012 .

[29]  Mana Sriyudthsak,et al.  Methanol and ammonia sensing characteristics of sol–gel derived thin film gas sensor , 2000 .

[30]  Carles Cané,et al.  Ozone monitoring by micro-machined sensors with WO3 sensing films , 2007 .

[31]  Vladimir M. Aroutiounian,et al.  Sol–gel derived thin-film semiconductor hydrogen gas sensor , 2007 .

[32]  Giorgio Sberveglieri,et al.  Investigation on the O3 sensitivity properties of WO3 thin films prepared by sol–gel, thermal evaporation and r.f. sputtering techniques , 2000 .

[33]  Giorgio Sberveglieri,et al.  Ozone detection using low-power-consumption metal–oxide gas sensors , 1999 .

[34]  P. Maddalena,et al.  (Ti, Sn)O2 binary solid solutions for gas sensing: Spectroscopic, optical and transport properties , 2008 .

[35]  Ghenadii Korotcenkov,et al.  Ozone sensors based on SnO2 films modified by SnO2–Au nanocomposites synthesized by the SILD method , 2009 .

[36]  Jérôme Brunet,et al.  Oxygen influence on the interaction mechanisms of ozone on SnO2 sensors , 2008 .

[37]  Khalifa Aguir,et al.  Impedance spectroscopy on WO3 gas sensor , 2005 .

[38]  Carles Cané,et al.  Micro-machined WO3-based sensors selective to oxidizing gases , 2008 .

[39]  Sutichai Chaisitsak,et al.  Nanocrystalline SnO2:F Thin Films for Liquid Petroleum Gas Sensors , 2011, Sensors.

[40]  Khalifa Aguir,et al.  Characterization of ozone sensors based on WO3 reactively sputtered films: influence of O2 concentration in the sputtering gas, and working temperature , 2004 .

[41]  K. Aguir,et al.  A dynamic response model for the WO3-based ozone sensors , 2008 .

[42]  Ghenadii Korotcenkov,et al.  Structural and gas response characterization of nano-size SnO2 films deposited by SILD method , 2003 .

[43]  Khalifa Aguir,et al.  Cobalt nanograins effect on the ozone detection by WO3 sensors , 2008 .

[44]  K. Aguir,et al.  Alternating current investigation and modeling of the temperature and ozone effects on the grains and the grain boundary contributions to the WO3 sensor responses , 2009 .

[45]  S. Capone,et al.  SnO2 sol–gel derived thin films for integrated gas sensors , 2001 .

[46]  Joseph R. Stetter,et al.  Effect of air humidity on gas response of SnO2 thin film ozone sensors , 2007 .

[47]  Khalifa Aguir,et al.  Electrical properties of reactively sputtered WO3 thin films as ozone gas sensor , 2002 .

[48]  Matteo Ferroni,et al.  Synthesis and characterization of semiconducting nanowires for gas sensing , 2007 .

[49]  T.K.H. Starke,et al.  High sensitivity ozone sensors for environmental monitoring produced using laser ablated nanocrystalline metal oxides , 2002 .

[50]  Tin dioxide sol-gel derived thin films deposited on porous silicon , 1996 .

[51]  G. Coles,et al.  High sensitivity NO2 sensors for environmental monitoring produced using laser ablated nanocrystalline metal oxides , 2002 .