MEMS Gyros for Space Applications - Overview of European Activities

The recent technological breakthrough in the area of Micro Electro Mechanical Systems (MEMS) have reached the stage where the MEMS rate sensors now present an undeniable interest for use in space. However, in spite of their small size, low mass, low power and low recurring cost, together with their inherent immunity from shock and environmental vibration and the lack of a wear out mechanism, the terrestrial off-the-shelf MEMS sensors, currently used for automotive applications, still require major technical adaptations to be suitable for space applications. Various design improvements to enhance the detector performance and to make the terrestrial electronics robust with respect to space environment, e.g. high radiation environment, are required. Recently, a series of feasibility assessments showed that it is now feasible to develop a very low-mass, low-power and lowrecurrent cost three-axis rate measurement sensor for space use based on terrestrial MEMS technology. It has also been shown that there exists a large demand for such a unit in the world space market, including telecom satellite applications. This paper describes the results of several recent ESA-funded market analyses and feasibility studies. Reliability and characterization testing of MEMS gyroscopes have also been completed. The paper also gives the status of the recently initiated development of a European MEMS rate sensor for space applications.