High speed force-volume mapping using atomic force microscope.

This article proposes a control approach based on the notion of superimposition and iterative learning control to achieve high-speed force-volume mapping on scanning probe microscope (SPM). Current forcevolume mapping measurement is slow, resulting in large temporal errors in the force mapping when rapid dynamic evolution is involved in the sample. The force-volume mapping speed is limited by the challenge to overcome the hardware adverse effects excited during high-speed mapping, particularly over a relatively large sample area. The contribution of this article is the development of a novel control approach to high-speed force-volume mapping. The proposed approach utilizes the concept of signal decoupling-superimposition and the recently-developed model-less inversion-based iterative control (MIIC) technique. Experiment on force-curve mapping of a Polydimethylsiloxane (PDMS) sample is presented to illustrate the proposed approach. The experimental results show that the mapping speed can be increased by over 20 times.

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