Research Advances in CMOS Millimeter and Submillimeter Wave Integrated Circuits

Recent years,the working frequency of CMOS integrated circuits(ICs) is rapidly extending to millimeter wave even submillimeter wave frequency bands,which break through the traditional concept that the CMOS process is only capable of digital circuits and low frequency analog circuits.In the coming ten years,it could be predicted that the CMOS ICs will be practicable over millimeter wave band and partially applicable in submillimeter or terahertz band.In China,some research advances in CMOS millimeter wave and submillimeter wave ICs have been achieved under the support from National Basic Research Program("973" Program) of China,the National High Technology Research and Development Program("863" Program) of China and Nature Science Foundation of China(NSFC).In this paper,we will summarily review the state of arts in CMOS millimeter wave and submillimeter wave ICs,especially the new progress in the State Key Laboratory of Millimeter Waves.