The effect of carbonaceous deposit for NO/sub x/ dissociation by barrier discharge

Summary form only given. A carbonaceous deposit was formed on the dielectric and the surface of electrodes, when the barrier discharge is generated in the mixed gas of CH/sub 4/ and N/sub 2/+NO. The authors have done this pre-treatment, changing the ratio of CH/sub 4/ and N/sub 2/+NO gases from 60 to 80%, under the condition of 500 to 700 Torr in pressure. After this pre-treatment was carried out, we introduced N/sub 2/+NO gas into the chamber. NO/sub x/ dissociation was done with 700 Torr of pressure in the chamber and 300 ml/min of flow rate. The authors investigated the effect of carbonaceous deposit and barrier discharge for NO/sub x/ dissociation. We measured mass spectra on NO/sub x/ by Q-mass. The dielectric is hard glass of 0.15 mm in thickness. The length of gap is 0.8 mm. An applied potential between electrodes was about 4,000 volts AC (peak value) and its frequency was 4.7 kHz.