DC sputter deposition of amorphous indium–gallium–zinc–oxide (a-IGZO) films with H2O introduction
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Yasushi Sato | Nobuto Oka | Ryo Hayashi | Yuzo Shigesato | R. Hayashi | H. Kumomi | Nobuto Oka | Yasushi Sato | Y. Shigesato | Hideya Kumomi | Takafumi Aoi | Takafumi Aoi | Y. Sato
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