Accurate model for Schottky-contacted coplanar waveguide including finite epilayer resistance effects

A new quasistatic model for Schottky-contacted coplanar waveguide (CPW) on a semiconductor substrate is presented. Comparison between experimental measurements for a CPW on a GaAs epilayer and calculations show excellent agreement from 45 MHz to 40 GHz. The new model includes the effect of the finite resistance of the undepleted epilayers under the CPW electrodes.